High density organic bridge device and method

ABSTRACT

Embodiments that allow multi-chip interconnect using organic bridges are described. In some embodiments an organic package substrate has an embedded organic bridge. The organic bridge can have interconnect structures that allow attachment of die to be interconnected by the organic bridge. In some embodiments, the organic bridge comprises a metal routing layer, a metal pad layer and interleaved organic polymer dielectric layers but without a substrate layer. Embodiments having only a few layers may be embedded into the top layer or top few layers of the organic package substrate. Methods of manufacture are also described.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.13/722,203, filed Dec. 20, 2012, which is incorporated by referenceherein in its entirety.

TECHNICAL FIELD

Embodiments pertain to integrated circuit (IC) dies, multi-chippackages, and associated methods. More particularly, embodiments pertainto using an organic bridge in an organic package substrate tointerconnect dies with a high density interconnect.

BACKGROUND

In order to enhance performance, processing unit products areincreasingly integrating multiple die within the processing unit packagein a side-by-side or other multi-chip-module (MCM) format. Intraditional MCM format, the chip die are interconnected via connectionswithin the substrate. One way to increase the input-output (IO) capacityis to connect the die through embedded IO bridge die featuring a veryhigh wiring density locally between die. Patterning dense metal featureson a silicon substrate is the conventional fabrication approach. Thisenables very fine feature, size consistent backend metallization, and agreat number of IO interconnections. However, there is a significantmismatch between the coefficient of thermal expansion (CTE) of anorganic package and a silicon bridge, leading to delamination andcracking between multiple materials. With multiple process steps used inproduction of the MCM after the silicon bridge has been placed in thesubstrate, the manufacturing process itself can lead to cracking anddelamination. Additionally, embedding an external bridge made out ofsilicon to increase the local IO makes the silicon bridge ultra-thin andembedding the silicon bridge within the substrate can be challenging.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a general microelectronic process according to someembodiments;

FIG. 2 illustrates a plan view of a microelectronic package according tosome embodiments;

FIG. 3 illustrates a cross sectional view of an organic bridge placedwithin a substrate according to some embodiments; and

FIG. 4 illustrates a process to create an organic bridge according tosome embodiments.

DETAILED DESCRIPTION

The following description and the drawings sufficiently illustratespecific embodiments to enable those skilled in the art to practicethem. Other embodiments may incorporate structural, logical, electrical,process, and other changes. Portions and features of some embodimentsmay be included in, or substituted for, those of other embodiments.Embodiments set forth in the claims encompass all available equivalentsof those claims.

FIG. 1 illustrates a general microelectronic process according to someembodiments. The process, illustrated generally as 100, takes assembliesmade from a substrate manufacturing process 102, a bridge manufacturingprocess 104 and assembles them as shown in 108 to produce amicroelectronic package/device such as multichip package 110.

Die manufacturing process 106 is illustrated in dashed form to indicatethat the die can be assembled on the substrate and bridge in the sameprocess 108 or in a separate process at a later time. Die manufacturingprocess 106 can be any process sufficient to produce desired dies thatwill be incorporated into the final product. No further description ofdie manufacturing 106 will be given as it is not important to thedisclosure herein.

Substrate manufacturing process 102 may comprise any process to producea suitable package substrate that may be used, for example, inmulti-chip packaging. Separate substrate manufacturing process 102allows the process to be tuned effectively for the particular packagesubstrate. In general, this means that the package substrates andprocess 102 can be tailored to only those aspects driven by the packagesubstrate (and the bridge placement) and not those aspects driven by thebridge itself. In general, this allows using a less expensive process, aprocess that provides a higher yield, a higher volume, more relaxedgeometries on conductors on and within the package substrate, acombination of all of these, or some other particular criteria orcombination of criteria. Typically package substrates are made from anorganic polymer such as an epoxy. Package substrates may have a varietyof materials such as silica, calcium oxide, magnesium oxide, etc., addedto the organic polymer to achieve particular properties such as adesired glass transition temperature or other desired properties.

Package substrates produced by substrate manufacturing process 102 mayinclude various layers and geometries such as wires and connectionpoints. In one example, substrates can be produced using design rules ofabout a 40 μm wire width and about a 40 μm wire spacing. Similarly,build-up layers, if any, can be thicker than those used by bridgemanufacturing process 104 to produce organic bridges.

Bridge manufacturing process 104 may comprise a process to produce ahigh density interconnect bridge suitable for placement in the packagesubstrate. An example process is discussed in conjunction with FIG. 4below. Bridges may be made from an organic polymer such as an epoxywithout its own substrate (e.g. with only a few build-up layers or asingle build-up layer comprising routing and pad layers). In oneembodiment organic bridges produced by bridge manufacturing process 104are less than about 30 μm thick. In another embodiment, organic bridgesproduced by bridge manufacturing process 104 are about 1.5 μm thick.

In embodiments of the bridge that have no substrate, when the bridge isplaced on the package substrate as part of assembly process 108, thebridge conforms to the contours of the layer in the package substratebeneath it. This helps minimize inter-material issues such as cracking,chipping or delamination. The thinness of the bridge makes it easier tosatisfy any z-height requirements of the process and/or package. Forembodiments manufactured without a substrate, bridge manufacturingprocess 104 can use low cost, reusable glass carriers.

The organic polymer used in bridge manufacturing process 104 to produceorganic bridges may be the same as, or different from, the organicpolymer of the substrate. Since both materials are organic, the organicbridges have better interfacial adhesion (compared, for example, tobridges made out of silicon). Since both materials are organic,cracking, chipping, delamination and other issues associated with use ofdissimilar materials can be minimized.

Bridge manufacturing process 104 may be designed to produce small, highdensity geometries in the bridge to carry high density IO interconnects.In one embodiment, organic bridge manufacturing process 104 uses designrules of about 3 μm or less wire width and about 3 μm or less wirespacing. In another embodiment, organic bridge manufacturing process 104uses design rules of about 3 μm or less in wire width and spacing insome areas or layers and wider wire width and spacing in other areas orlayers of the bridge (e.g., about 10 μm wire width and about 10 μm wirespacing).

FIG. 2 illustrates a plan view of a microelectronic package according tosome embodiments. The package 200 has package substrate 212 and anorganic bridge 14 embedded in package substrate 212. Package substrate212 may comprise an organic polymer such as an epoxy. Organic bridge 214may also comprise an organic polymer such as an epoxy. The organicpolymer of organic bridge 214 may be the same as, or different from, theorganic polymer of package substrate 212.

Organic bridge 214 comprises an interconnect structure 216 located at alocation 220 and an interconnect structure 218 located at a location222. Interconnect structure 216 and interconnect structure 218 maycomprise a plurality of connection points, such as the connection pointillustrated as 208. The various connection points within interconnectstructure 216 and 218 are connected by conductive paths. In FIG. 2,example conductive paths are illustrated by 210. Connections between thevarious connection points are appropriate to the die that will beinterconnected by organic bridge 214. Locations 220 and 221, shown indashed lines, indicate the locations where die interconnected by organicbridge 214 will be placed.

Interconnect structures 216 & 218 on an organic bridge 214 are typicallylocated toward an end of the organic bridge 214. Thus, locations 220 and222 are typically toward the ends of organic bridge 214. However, thelocation of interconnect structures 216 & 218 are determined by the diethat will be interconnected by the organic bridge 14.

Microelectronic package 200 may comprise multiple organic bridges 214,each having multiple interconnect structures 216 & 218 in order tointerconnect multiple die. In FIG. 2, additional organic bridges areillustrated by 202, interconnect structures are illustrated by 204 anddie placement locations are illustrated in dashed lines by 206. Theseorganic bridges 202 may be similar to organic bridge 214. Interconnectstructures 204 may be similar to interconnect structure 216 and/orinterconnect structure 218.

FIG. 3 illustrates across sectional view of an organic bridge 202 placedwithin a substrate according to some embodiments. The assembly,illustrated generally as 300, may comprise a substrate 302 and anorganic bridge 304. Substrate 302 may be a package substrate 302, suchas that manufactured by substrate manufacturing process 102 of FIG. 1and may comprise an organic polymer such as an epoxy.

Substrate 302 may comprise connection points 306 to connect a die, suchas die 318 and 319 to substrate 302. Connection points 306 andassociated conductive paths (not shown) may adhere to design rulesappropriate for substrate 302. In one embodiment, the design rules ofsubstrate 302 allow larger geometries (for e.g. connection points 306)than the design rules of embedded organic bridge 304. In one example,substrate 302 can be produced using design rules of about a 40 μm wirewidth and about a 40 μm wire spacing. Similarly, build-up layers, ifany, can be thicker than those in organic bridge 304.

Substrate 302 has a recess to receive organic bridge 304. Depending onthe thickness of the dielectric and other layers of substrate 302 andthe thickness of organic bridge 304, the recess may only need to extendinto the outermost layer or multiple outermost layers. Such a recess canbe formed within substrate 302, for example, by using laser scribing.

Organic bridge 304 may comprise an organic polymer such as an epoxy. Theorganic polymer of organic bridge 304 may be the same as, or differentfrom, the organic polymer of substrate 302. For clarity, some of thevarious layers of organic bridge 304 are illustrated in various patternsso they can be distinguished from the surrounding items.

Organic bridge 304 is placed into a recess of substrate 302 using anorganic polymer to adhere organic bridge 304 into the recess. Theorganic polymer can be a dye bonding film, an epoxy, or any other typeof organic polymer that sufficiently adheres organic bridge 304 tosubstrate 302. In FIG. 3, bonding organic bridge 304 to substrate 302 isillustrated by 308. Since substrate 302 and organic bridge 304 bothcomprise an organic polymer, layer 308 can adhere organic bridge 304 tosubstrate 302 in a way that minimizes problems arising from theinterface of two dissimilar materials such as chipping, cracking anddelamination.

Organic bridge 304 is represented in FIG. 3 by layer 310, 312 and 314and 316. Layer 310 represents a metal layer within organic bridge 304,which may be included as part of the bridge 304. Layer 314 represents ametal routing layer embedded within dielectric layer 312. Dielectriclayer 312 comprises an organic polymer such as an epoxy and representsinterleaved dielectric layers 312. Layer 316 represents a pad layerwhere, for example, interconnect structures 204 can be formed as part oforganic bridge 304. In one embodiment, the design rules for organicbridge 304 comprise about 3 μm or less wire width and about 3 μm or lesswire spacing. In another embodiment, the design rules for organic bridge304 comprises about 3 μm or less in wire width and spacing in some areasor layers and wider wire width and spacing in other areas or layers ofthe bridge (e.g., about 10 μm wire width and about 10 μm wire spacing).

Some embodiments of organic bridge 304 have no substrate 302. Suchembodiments may comprise routing and pad layers 314 & 316 and, possiblysome additional metal layers all with interleaved dielectric layers 312but without, for example, a substrate 302. Having no substrate 302 meansthat those embodiments of organic bridge 304 have no layer that hassubstantial silicon content. In such embodiments, any “substrate” layerwould be made substantially of a metal or an organic polymer such as anepoxy. The organic polymer may include various additives such as silica,calcium oxide, magnesium oxide, or other additive to modify certaindesired properties of the organic polymer.

In one embodiment organic bridge 304 has no substrate 302 and is about15 μm thick. In another embodiment organic bridge 304 has no substrate302 and is less than about 20 μm thick. In yet another embodimentorganic bridge 304 has no substrate 302 and is less than about 30 μmthick. Since organic bridge 304 has no substrate 302, it tends toconform to the contours of the recess into which it is placed. In suchembodiments, the lack of a substrate 302 and the thinness of organicbridge 304 allows organic bridge 304 to be incorporated into a soldermask cavity on the surface layer of the of substrate 302 and ultra finepitch dies can be directly connected by thermo-compression basedbonding.

FIG. 4 illustrates a process to create an organic bridge 304 accordingto some embodiments. Such a process can be used, for example, in bridgemanufacturing process 104 of FIG. 1. In FIG. 4, the process illustratedgenerally as 400 is a spin-on-glass (SoG) technique. SoG has the abilityto provide finer trace and spacing than other processes, and thus isillustrated here. However, other processes may also be used.

In 402 a carrier wafer of silicon or glass is obtained. Since theincoming carrier wafer will not form part of the final organic bridge304, inexpensive, reusable carrier wafers can be used for the process.

In 404 a release layer and the lower dielectric (SoG) layer isdeposited. As previously described, the dielectric layer 312 comprisesan organic polymer such as an epoxy.

In 406, seed layer deposition occurs, for example by sputtering. Dryfile resist (DFR) and patterning of the seed layer also occurs.

In 408, plating occurs along with DFR stripping and application of thenext dielectric layer 312 using SoG techniques.

In 410 via formation occurs along with seed layer deposition using, forexample, sputtering. DFR application and patterning also occurs.

In 412 continuation of all metal layers occurs along with the finalsolder resist (SR) layer and patterning.

In 414 the resultant assembly is released from the carrier wafer andbridge singulation (e.g. separating the assembly into individual organicbridges 304) occurs.

In general, organic bridges 304, such as those described in conjunctionwith EEGs. 1-3, are only a few layers thick, perhaps only the routinglayer 314, pad layer 316, ground and reference layers for the signallayers, plus interleaved dielectric layers 312. In such a situation,this two layer organic bridge 304 will be about 15 μm thick. However, ifdesired, the process illustrated in 408 and/or 410 can be repeated asappropriate to achieve an organic bridge 304 of perhaps three or fourlayers having a thickness of about 20 μm to about 30 μm.

The above detailed description includes references to the accompanyingdrawings, which form a part of the detailed description. The drawingsshow, by way of illustration, specific embodiments in which thedisclosure may be practiced. These embodiments are also referred toherein as “examples.” Such examples may include elements in addition tothose shown or described. However, the present inventors alsocontemplate examples in which only those elements shown or described areprovided. Moreover, the present inventors also contemplate examplesusing any combination or permutation of those elements shown ordescribed (or one or more aspects thereof), either with respect to aparticular example (or one or more aspects thereof), or with respect toother examples (or one or more aspects thereof) shown or describedherein.

In this document, the terms “a” or “an” are used, as is common in patentdocuments, to include one or more than one, independent of any otherinstances or usages of “at least one” or “one or more.” In thisdocument, the term “or” is used to refer to a nonexclusive or, such that“A or B” includes “A but not B,” “B but not A,” and “A and B,” unlessotherwise indicated. In this document, the terms “including” and “inwhich” are used as the plain-English equivalents of the respective terms“comprising” and “wherein.” Also, in the following claims, the terms“including” and “comprising” are open-ended, that is, a system, device,article, composition, formulation, or process that includes elements inaddition to those listed after such a term in a claim are still deemedto fall within the scope of that claim. Moreover, in the followingclaims, the terms “first,” “second,” and “third,” etc. are used merelyas labels, and are not intended to impose numerical requirements ontheir objects.

The above description is intended to be illustrative, and notrestrictive. For example, the above-described examples (or one or moreaspects thereof) may be used in combination with each other. Otherembodiments may be used, such as by one of ordinary skill in the artupon reviewing the above description. The Abstract is provided to complywith 37 C.F.R. §1.72(b), to allow the reader to quickly ascertain thenature of the technical disclosure. It is submitted with theunderstanding that it will not be used to interpret or limit the scopeor meaning of the claims. Also, in the above Detailed Description,various features may be grouped together to streamline the disclosure.This should not be interpreted as intending that an unclaimed disclosedfeature is essential to any claim. Rather, inventive subject matter maylie in less than all features of a particular disclosed embodiment.Thus, the following claims are hereby incorporated into the DetailedDescription, with each claim standing on its own as a separateembodiment, and it is contemplated that such embodiments may be combinedwith each other in various combinations or permutations. The scope ofthe inventive material should be determined with reference to theappended claims, along with the full scope of equivalents to which suchclaims are entitled.

What is claimed is:
 1. A microelectronic package comprising: an organicpolymer substrate created using a first set of design rules having afirst wire width of about 40 μm and first wire spacing of about 40 μm;an organic polymer bridge embedded in the substrate, created using asecond set of design rules in at least portion of the organic polymerbridge, the second set of design rules having a second wire width ofabout 3 μm and a second wire spacing of about 3 μm; a first interconnectstructure at a first location of the organic polymer bridge and a secondinterconnect structure at a second location of the organic polymerbridge; and an electrically conductive path in the organic polymerbridge connecting the first interconnect structure to the secondinterconnect structure.
 2. The microelectronic package of claim 1wherein the organic polymer substrate contains a recess and the organicpolymer bridge is embedded into the recess using an organic polymer. 3.The microelectronic package of claim 2 wherein the organic polymersubstrate and the organic polymer bridge are made from the same organicpolymer.
 4. The microelectronic package of claim 2 wherein the organicpolymer substrate and the organic polymer bridge are made from differentorganic polymers.
 5. The microelectronic package of claim 2 wherein theorganic polymer used to bond the organic polymer bridge to the organicpolymer substrate is a die bonding film or an epoxy.
 6. Themicroelectronic package of claim 1 wherein the organic polymer bridgecomprises a third set of design rules in at least one other portion ofthe organic bridge, the third set of design rules having third wirewidth of about 10 μm and a third wire spacing of about 10 μm.
 7. Themicroelectronic package of claim 1 wherein the organic polymer bridgehas a total thickness of less than about 20 μm.
 8. An organic bridgeadapted to interconnect a plurality of die, the organic bridgecomprising: a plurality of metal routing layers; a metal pad layer; atleast a portion of the plurality of metal routing layers or at least aportion of the metal pad layer or at least a portion of both adhering toa first set of design rules having a first wire width of about 3 μm andfirst wire spacing of about 3 μm; interleaved organic polymer dielectriclayers between each metal routing layer and the metal pad layer; andwherein there is no layer made substantially of silicon.
 9. The organicbridge of claim 8 wherein at least a second portion of the plurality ofmetal routing layers or at least a second portion of the metal pad layeror at least a second portion of both adhering to a second set of designrules having a second wire width of about 10 μm and second wire spacingof about 10 μm.
 10. The organic bridge of claim 8 wherein all layershave a combined thickness of about 15 μm.
 11. The organic bridge ofclaim 8 wherein the metal pad layer comprises a plurality ofinterconnect structures.
 12. The organic bridge of claim 11 wherein afirst of the plurality of interconnect structures is adapted to connectto a first die and wherein a second of the plurality of interconnectstructures is adapted to connect to a second die.
 13. The organic bridgeof claim 8 wherein the organic polymer bridge has a thickness of about15 μm to about 20 μm.
 14. A microelectronic package comprising: anorganic polymer package substrate created using a first set of designrules having a first wire width of about 40 μm and first wire spacing ofabout 40 μm; and an organic polymer bridge created using a second set ofdesign rules in at least a portion of the organic bridge having a secondwire width of about 3 μm and a second wire spacing of about 3 μm, theorganic polymer bridge comprising a metal pad layer, a metal routinglayer and interleaved dielectric layers, the organic polymer bridgebeing embedded in the organic polymer package substrate.
 15. Themicroelectronic package of claim 14 wherein the organic polymer bridgehas a thickness of about 15 μm to about 20 μm.
 16. The microelectronicpackage of claim 14 wherein the organic polymer bridge comprises a thirdset of design rules in at least one other portion of the organic bridge,the third set of design rules having third wire width of about 10 μm anda third wire spacing of about 10 μm.
 17. A method comprising: providingan organic bridge comprising: a plurality of metal routing layers; ametal pad layer; at least a portion of the plurality of metal routinglayers or at least a portion of the metal pad layer or at least aportion of both adhering to a first set of design rules having a firstwire width of about 3 μm and first wire spacing of about 3 μm;interleaved organic polymer dielectric layers between each metal routinglayer and the metal pad layer, wherein there is no layer madesubstantially of silicon; providing an organic package substrate havinga recess formed therein; and bonding the organic bridge into the recessof the organic package using an organic polymer.
 18. The method of claim17, wherein all layers of the organic bridge have a thickness of about15 gm to about 20 gm.
 19. The method of claim 17 wherein the metal padlayer comprises a plurality of interconnects and wherein the methodfurther comprises bonding a first die to one of the plurality ofinterconnects and bonding a second die to another of the plurality ofinterconnects, the bonding of the first die and the second die beingaccomplished using thermo-compression based bonding.
 20. The method ofclaim 17, wherein the organic bridge is bonded into a single builduplayer of the organic package substrate.